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Ion Tracks and Microtechnology
Concluding remarks
other
Author(s):
Reimar Spohr
Publication date
(Print):
1990
Publisher:
Vieweg+Teubner Verlag
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Production and use of nuclear tracks: imprinting structure on solids
Bernd Fischer
,
Reimar Spohr
(1983)
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Lehrbuch der Theoretischen Physik
Siegfried Flügge
(1961)
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Heavy ion microlithography — a new tool to generate and investigate submicroscopic structures
Bernd Fischer
,
Reimar Spohr
(1980)
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Author and book information
Book Chapter
Publication date (Print):
1990
Page
: 262
DOI:
10.1007/978-3-322-83103-3_12
SO-VID:
4b05391f-f35a-48b6-b3b1-6dfe26dbacb9
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Book chapters
pp. 1
Introduction
pp. 14
Irradiation technology
pp. 49
Energy-loss phenomena
pp. 93
Formation of the latent track
pp. 126
Development of ion tracks
pp. 155
Observation of ion tracks
pp. 167
Resulting structures
pp. 183
Single-ion tracks
pp. 211
Multiple ion tracks
pp. 230
Bulk properties
pp. 246
Growth areas
pp. 262
Concluding remarks
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