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2DOF Control Design for Nanopositioning
Author(s):
Chibum Lee
,
Gayathri Mohan
,
Srinivasa Salapaka
Publication date:
2011
Journal:
Control Technologies for Emerging Micro and Nanoscale Systems
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Citation Behaviour and Practice
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DOI::
10.1007/978-3-642-22173-6_4
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