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High-Speed Control of Electromechanical Transduction: Advanced Drive Techniques for Optimized Step-and-Settle Response of MEMS Micromirrors
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Publication date:
2016-10-01
Journal:
IEEE Control Systems
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
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Electrostatic pull-in instability in MEMS/NEMS: A review
Wen-Ming Zhang
,
Han Yan
,
Zhi-Ke Peng
…
(2014)
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Preshaping Command Inputs to Reduce System Vibration
W P Seering
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N. C. Singer
(1990)
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Silicon carbide MEMS for harsh environments
Chien Hung Wu
,
N. Rajan
,
C.A. Zorman
…
(1998)
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DOI::
10.1109/MCS.2016.2584338
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