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      High-Speed Control of Electromechanical Transduction: Advanced Drive Techniques for Optimized Step-and-Settle Response of MEMS Micromirrors

      IEEE Control Systems
      Institute of Electrical and Electronics Engineers (IEEE)

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          Electrostatic pull-in instability in MEMS/NEMS: A review

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            Preshaping Command Inputs to Reduce System Vibration

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              Silicon carbide MEMS for harsh environments

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                Journal
                10.1109/MCS.2016.2584338

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