In this paper, temperature dependence of nanoporous framework evolution process and variety of pore properties (pore volume, specific surface area (BET), and pore size) of SiO 2 aerogels were characterized by FTIR, XPS, XRD, SEM, TEM, BET, BJH, etc. Results show that SiO 2 aerogels treated at different temperatures all possess amorphous structure. With the increase of treated temperatures, BET values of SiO 2 aerogels increase initially and then decrease, and it reaches the maximum value of 882.81 m 2/g when treated at 600 ℃ for 2 h due to the addition of the nanopores and shrinkage skeleton of SiO 2 aerogels. Higher temperatures may result in a framework transformation and particle growth; both factors could reduce the BET values of the aerogels. Nanoporous skeleton of SiO 2 aerogels at room temperatures is composed of tetrahedron with a pore size of about 22.28 nm. Higher treated temperatures result in an increase of octahedron amount in nanoporous framework and a decrease of pore size. When treated at 1000 ℃, an approximate dense SiO 2 bulk via the framework collapse and particle growth is obtained. These varieties are derived from the formed extra bonds of Si–O–Si, higher local stress, and liquid phase between particles during heat treatment process.