ScienceOpen:
research and publishing network
For Publishers
Discovery
Metadata
Peer review
Hosting
Publishing
For Researchers
Join
Publish
Review
Collect
My ScienceOpen
Sign in
Register
Dashboard
Blog
About
Search
Advanced search
My ScienceOpen
Sign in
Register
Dashboard
Search
Search
Advanced search
For Publishers
Discovery
Metadata
Peer review
Hosting
Publishing
For Researchers
Join
Publish
Review
Collect
Blog
About
2
views
13
references
Top references
cited by
13
Cite as...
0 reviews
Review
0
comments
Comment
0
recommends
+1
Recommend
0
collections
Add to
0
shares
Share
Twitter
Sina Weibo
Facebook
Email
2,829
similar
All similar
Record
: found
Abstract
: not found
Article
: not found
Synchrotron radiation‐excited chemical vapor deposition of SixNyHzfilm
Author(s):
Hakaru Kyuragi
,
Tsuneo Urisu
Publication date
Created:
March 1987
Publication date
(Print):
March 1987
Journal:
Journal of Applied Physics
Publisher:
AIP Publishing
Read this article at
ScienceOpen
Publisher
Further versions
open (via free pdf)
Powered by
Review
Review article
Invite someone to review
Bookmark
Cite as...
There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.
Related collections
ScienceOpen Research
Most cited references
13
Record
: found
Abstract
: not found
Article
: not found
The hydrogen content of plasma-deposited silicon nitride
M Rand
,
W A Lanford
(1978)
0
comments
Cited
167
times
– based on
0
reviews
Review now
Bookmark
Record
: found
Abstract
: not found
Article
: not found
A review of laser–microchemical processing
D. Ehrlich
(1983)
0
comments
Cited
95
times
– based on
0
reviews
Review now
Bookmark
Record
: found
Abstract
: not found
Article
: not found
Temperature profiles induced by a scanning cw laser beam
R. Hendel
,
J. Moody
(1982)
0
comments
Cited
67
times
– based on
0
reviews
Review now
Bookmark
All references
Author and article information
Journal
Title:
Journal of Applied Physics
Abbreviated Title:
Journal of Applied Physics
Publisher:
AIP Publishing
ISSN (Print):
0021-8979
ISSN (Electronic):
1089-7550
Publication date Created:
March 1987
Publication date (Print):
March 1987
Volume
: 61
Issue
: 5
Pages
: 2035-2037
Article
DOI:
10.1063/1.338001
SO-VID:
0246ba70-8225-4138-8c59-04269abbdfd7
Copyright ©
© 1987
History
Data availability:
Comments
Comment on this article
Sign in to comment
scite_
Similar content
2,829
In situ characterizations of phase transformations kinetics in the Ti17 titanium alloy by electrical resistivity and high temperature synchrotron X-ray diffraction
Authors:
Fabien Bruneseaux
,
Elisabeth Aeby-Gautier
,
Guillaume Geandier
…
Constraints on the role of synchrotron X-rays from jets of accreting black holes
Authors:
S. Heinz
Infrared microscopy of epithelial cancer cells in whole tissues and in tissue culture, using synchrotron radiation
Authors:
M. Tobin
,
M. Chesters
,
Mark J. Tobin
…
See all similar
Cited by
13
Synchrotron radiation excited Si epitaxial growth using disilane gas source molecular beam system
Authors:
Yuichi Utsumi
,
Tsuneo Urisu
,
Jun-ichi Takahashi
…
Synchrotron‐radiation‐induced decomposition of thin native oxide films on Si(100)
Authors:
Yuji Takakuwa
,
Michio Niwano
,
Nobuo Miyamoto
…
Photostimulated evaporation of SiO2films by synchrotron radiation
Authors:
J. Takahashi
,
Y Utsumi
,
H Akazawa
…
See all cited by
Most referenced authors
57
J. M. White
M Hirose
M. Hirose
See all reference authors