Author(s):
S. Smith ,
T.B. Tang ,
J.T.M. Stevenson ,
B.W. Flynn ,
H.M. Reekie ,
A.F. Murray ,
A.M. Gundlach ,
D. Renshaw ,
B. Dhillon ,
A. Ohtori ,
Y. Inoue ,
A.J. Walton
Publication date (Print):
2006
Conference name: IET Seminar on MEMS Sensors and Actuators
Conference date: 27-28 April 2006