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A MEMS-based silicon micropump with intersecting channels and integrated hotwires
Author(s):
Van Dau
,
Thien Xuan Dinh
,
Susumu Sugiyama
,
V.T DAU
,
T.X. Dinh
,
S SUGIYAMA
,
V.T. Dau
,
S Sugiyama
Publication date:
2009
Journal:
Journal of Micromechanics and Microengineering
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Journal of Disability Research
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DOI::
10.1088/0960-1317/19/12/125016
ScienceOpen disciplines:
Engineering
,
Biomedical engineering
Data availability:
ScienceOpen disciplines:
Engineering
,
Biomedical engineering
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