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      Comprehensive ‘atomistic’ simulation of statistical variability and reliability in 14 nm generation FinFETs

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      IEEE
      2015 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
      October 9, 2015 - October 11, 2015

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          Conference
          IEEE
          September 2015
          September 2015
          : 157-160
          Article
          10.1109/SISPAD.2015.7292283
          04d0b1ef-5ae6-464c-8ead-3d40c92f7d10
          © 2015
          2015 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
          Washington DC, USA
          October 9, 2015 - October 11, 2015
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