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      A nanoporous silicon nitride membrane using a two-step lift-off pattern transfer with thermal nanoimprint lithography

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          Nanoporous Membranes with Ultrahigh Selectivity and Flux for the Filtration of Viruses

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            Cholesterol biosensor based on rf sputtered zinc oxide nanoporous thin film

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              Nanofabrication using a stencil mask

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                Author and article information

                Journal
                Journal of Micromechanics and Microengineering
                J. Micromech. Microeng.
                IOP Publishing
                0960-1317
                1361-6439
                April 01 2012
                April 01 2012
                March 15 2012
                : 22
                : 4
                : 045012
                Article
                10.1088/0960-1317/22/4/045012
                04e04479-8d12-406e-8993-1f7d7779b644
                © 2012
                History

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