Title:
Journal of Micromechanics and Microengineering
Abbreviated Title:
J. Micromech. Microeng.
Publisher:
IOP Publishing
ISSN
(Print):
0960-1317
ISSN
(Electronic):
1361-6439
Publication date Created:
April
01 2012
Publication date
(Print):
April
01 2012
Publication date
(Electronic):
March
15 2012
Volume: 22
Issue: 4
Page: 045012
Article
DOI: 10.1088/0960-1317/22/4/045012
SO-VID: 04e04479-8d12-406e-8993-1f7d7779b644
Copyright © ©
2012