2
views
0
recommends
+1 Recommend
0 collections
    0
    shares
      • Record: found
      • Abstract: not found
      • Article: not found

      Technology and applications of broad‐beam ion sources used in sputtering. Part I. Ion source technology

      , ,
      Journal of Vacuum Science and Technology
      American Vacuum Society

      Read this article at

      ScienceOpenPublisher
      Bookmark
          There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.

          Related collections

          Author and article information

          Journal
          Journal of Vacuum Science and Technology
          Journal of Vacuum Science and Technology
          American Vacuum Society
          0022-5355
          September 1982
          September 1982
          : 21
          : 3
          : 725-736
          Article
          10.1116/1.571819
          05f15119-8ada-42b3-a90a-bfa7d36752ad
          © 1982
          History

          Comments

          Comment on this article