Title:
Journal of Vacuum Science and Technology
Abbreviated Title:
Journal of Vacuum Science and Technology
Publisher:
American Vacuum Society
ISSN
(Print):
0022-5355
Publication date Created:
September
1982
Publication date
(Print):
September
1982
Volume: 21
Issue: 3
Pages: 725-736
Article
DOI: 10.1116/1.571819
SO-VID: 05f15119-8ada-42b3-a90a-bfa7d36752ad
Copyright © ©
1982