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      Modeling and Simulation of a Large-Area Plasma Source

      , , , ,
      Japanese Journal of Applied Physics
      Japan Society of Applied Physics

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          Author and article information

          Journal
          JAPNDE
          Japanese Journal of Applied Physics
          Jpn. J. Appl. Phys.
          Japan Society of Applied Physics
          0021-4922
          1347-4065
          September 15 1997
          September 15 1997
          : 36
          : Part 1, No. 9A
          : 5714-5723
          Article
          10.1143/JJAP.36.5714
          0620a461-99aa-4bd0-99f3-aac8ad150a77
          © 1997
          History

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