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      Practical SEM system based on the montage technique applicable to ultralow-magnification observation, while maintaining original functions

      1 , ,
      Journal of electron microscopy
      Oxford University Press (OUP)

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          Abstract

          A newly developed SEM system has been utilized for obtaining ultralow-magnification SEM images. It is a successful combination of the modern SEM equipped with a motor drive stage fully controlled with PC and digital image processing techniques for automatic montage. In order to accomplish a practical system, several problems peculiar to the field of SEM, i.e. raster rotation, peripheral distortion and charging effects, are discussed and solved. The function of ultralow-magnification (whole area) observation is important during a scanning electron microscopy session.

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          Author and article information

          Journal
          J Electron Microsc (Tokyo)
          Journal of electron microscopy
          Oxford University Press (OUP)
          1477-9986
          0022-0744
          2000
          : 49
          : 1
          Affiliations
          [1 ] Department of Electrical Engineering, Kogakuin University, Hachioji, Tokyo, Japan. oho@sin.cc.kogakuin.ac.jp
          Article
          10.1093/oxfordjournals.jmicro.a023777
          10791429
          087c5a62-6459-485b-88d9-d4c1c81ff680
          History

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