High-speed height measurement by a light-source-stepping method using a linear LED array.

Abstract

High-speed height measurement is required in industrial fields for analyzing the behavior of a breaking object, a vibrating object or a rotating object. A shape measurement performed using a phase-shifting method can measure the shape with high spatial resolution because the coordinates can be obtained pixel by pixel. A light-source-stepping method (LSSM) that uses a linear LED array by means of a whole-space tabulation method (WSTM) has been proposed. Accurate shape measurement can be performed using this method. The response speed of the LED array is greater than 12 kHz. In this paper, height measurement is performed using WSTM and LSSM with a linear LED array and a high-speed camera. It was verified that the response speed of the linear LED is greater than 200 kHz. The phase shifting was performed at 12 kHz, and the height measurement of the vibrating woofer was performed at 4 kHz using a 3-step phase-shifting method.