High mobility annealing of Transparent Conductive Oxides

Warzecha, M; Owen, J. I.; Wimmer, M.; Ruske, F.; Hotovy, J.; Hüpkes, Jürgen

doi:10.1088/1757-899X/34/1/012004

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High mobility annealing of Transparent Conductive Oxides

Author(s): M Warzecha , J I Owen , M Wimmer , F Ruske , J Hotovy , J Hüpkes

Publication date Created: April 23 2012

Publication date (Print): April 23 2012

Journal: IOP Conference Series: Materials Science and Engineering

Publisher: IOP Publishing

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Title: IOP Conference Series: Materials Science and Engineering

Abbreviated Title: IOP Conf. Ser.: Mater. Sci. Eng.

Publisher: IOP Publishing

ISSN (Electronic): 1757-899X

Publication date Created: April 23 2012

Publication date (Print): April 23 2012

Volume: 34

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Page: 012004

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DOI: 10.1088/1757-899X/34/1/012004

SO-VID: 097c80a0-629d-474d-b753-1cc040d483ea

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High mobility annealing of Transparent Conductive Oxides

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