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Observation of a plasma-sheath resonance in a parallel-plate low-pressure rf discharge
Author(s):
K. Orlov
,
A. SMIRNOV
,
A Smirnov
Publication date:
2001
Journal:
Plasma Sources Sci. Technol.
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Negative Pressure Wound Therapy
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DOI::
10.1088/0963-0252/10/4/301
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