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      Surface science aspects of etching reactions

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      Surface Science Reports
      Elsevier BV

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          Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

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            Theory of the oxidation of metals

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              Theory of Auger Ejection of Electrons from Metals by Ions

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                Author and article information

                Journal
                Surface Science Reports
                Surface Science Reports
                Elsevier BV
                01675729
                January 1992
                January 1992
                : 14
                : 4-6
                : 162-269
                Article
                10.1016/0167-5729(92)90009-Z
                0eead450-f981-4f8e-add5-388b5c2737f8
                © 1992

                http://www.elsevier.com/tdm/userlicense/1.0/

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