Titanium Silicide on Si:P With Precontact Amorphization Implantation Treatment: Contact Resistivity Approaching $1 \times 10^{-9}$ Ohm-cm2

Yu, Hao; Schaekers, Marc; Peter, Anthony; Pourtois, Geoffrey; Rosseel, Erik; Lee, Joon-Gon; Song, Woo-Bin; Shin, Keo Myoung; Everaert, Jean-Luc; Chew, Soon Aik; Demuynck, Steven; Kim, Daeyong; Barla, Kathy; Mocuta, Anda; Horiguchi, Naoto; Thean, Aaron Voon-Yew; Collaert, Nadine; De Meyer, Kristin

doi:10.1109/TED.2016.2616587

Record: found
Abstract: not found
Article: not found

Titanium Silicide on Si:P With Precontact Amorphization Implantation Treatment: Contact Resistivity Approaching $1 \times 10^{-9}$ Ohm-cm2

Author(s): Hao Yu , Marc Schaekers , Anthony Peter , Geoffrey Pourtois , Erik Rosseel , Joon-Gon Lee , Woo-Bin Song , Keo Myoung Shin , Jean-Luc Everaert , Soon Aik Chew , Steven Demuynck , Daeyong Kim , Kathy Barla , Anda Mocuta , Naoto Horiguchi , Aaron Voon-Yew Thean , Nadine Collaert , Kristin De Meyer

Publication date (Print): December 2016

Journal: IEEE Transactions on Electron Devices

Publisher: Institute of Electrical and Electronics Engineers (IEEE)

Read this article at

ScienceOpenPublisher

Bookmark

There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.

Related collections

Author and article information

Journal

Title: IEEE Transactions on Electron Devices

Abbreviated Title: IEEE Trans. Electron Devices

Publisher: Institute of Electrical and Electronics Engineers (IEEE)

ISSN (Print): 0018-9383

ISSN (Electronic): 1557-9646

Publication date Created: December 2016

Publication date (Print): December 2016

Volume: 63

Issue: 12

Pages: 4632-4641

Article

DOI: 10.1109/TED.2016.2616587

SO-VID: 0f786e71-8a6b-4ed2-b79c-073a11ea413d

History

Data availability:

Titanium Silicide on Si:P With Precontact Amorphization Implantation Treatment: Contact Resistivity Approaching $1 \times 10^{-9}$ Ohm-cm2

Read this article at

Related collections

UN Sustainable Development Goals on ScienceOpen

Author and article information

Journal

Article

History

Comments

Comment on this article

Similar content 1,349

Cited by 2