Title:
Journal of Micromechanics and Microengineering
Abbreviated Title:
J. Micromech. Microeng.
Publisher:
IOP Publishing
ISSN
(Print):
0960-1317
ISSN
(Electronic):
1361-6439
Publication date Created:
July
01 2007
Publication date
(Print):
July
01 2007
Volume: 17
Issue: 7
Pages: 1257-1265
Article
DOI: 10.1088/0960-1317/17/7/007
SO-VID: 11195ea4-cdbf-415d-b118-b889947a6edb
Copyright © ©
2007