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      Si-rich a-Si1−xCx thin films by d.c. magnetron co-sputtering of silicon and silicon carbide: Structural and optical properties

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          Journal
          Applied Surface Science
          Applied Surface Science
          Elsevier BV
          01694332
          January 2013
          January 2013
          : 265
          : 94-100
          Article
          10.1016/j.apsusc.2012.10.129
          11ef7b84-c027-4c37-970b-b6d2778fd1df
          © 2013

          https://www.elsevier.com/tdm/userlicense/1.0/

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