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      Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process

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      Journal: Journal of Applied Physics
      Publisher: AIP Publishing

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                Author and article information

                Journal
                Title: Journal of Applied Physics
                Abbreviated Title: Journal of Applied Physics
                Publisher: AIP Publishing
                ISSN (Print): 0021-8979
                ISSN (Electronic): 1089-7550
                Publication date Created: June 15 2005
                Publication date (Print): June 15 2005
                Volume: 97
                Issue: 12
                Page: 121301
                Article
                DOI: 10.1063/1.1940727
                SO-VID: 129ebd8c-1f51-4f00-9c2b-b5674d55d980
                Copyright statement: © 2005
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                Self URI (article page): http://aip.scitation.org/doi/10.1063/1.1940727

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