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      Molecularly engineered low temperature atomic layer growth of aluminum nitride on Si(100)

      Author(s): ,
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      Journal: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
      Publisher: American Vacuum Society

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          Quantitative electron spectroscopy of surfaces: A standard data base for electron inelastic mean free paths in solids

          M. Seah, W. Dench (1979)
          Article 0 comments Cited 790 times – based on 0 reviews     Review now
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            InGaN-Based Multi-Quantum-Well-Structure Laser Diodes

            Toshio Matsushita, Shuji Nakamura, Masayuki Senoh … (1996)
            Article 0 comments Cited 523 times – based on 0 reviews     Review now
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              Low Temperature Surface Cleaning of Silicon and Its Application to Silicon MBE

              Akitoshi Ishizaka (1986)
              Article 0 comments Cited 338 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
                Abbreviated Title: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
                Publisher: American Vacuum Society
                ISSN (Print): 0734-2101
                ISSN (Electronic): 1520-8559
                Publication date Created: March 1999
                Publication date (Print): March 1999
                Volume: 17
                Issue: 2
                Pages: 325-331
                Article
                DOI: 10.1116/1.581591
                SO-VID: 15b56b91-1a4f-49b0-b834-866d61f52c02
                Copyright © © 1999
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