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      Recent advances in nanorobotic manipulation inside scanning electron microscopes

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          Abstract

          A scanning electron microscope (SEM) provides real-time imaging with nanometer resolution and a large scanning area, which enables the development and integration of robotic nanomanipulation systems inside a vacuum chamber to realize simultaneous imaging and direct interactions with nanoscaled samples. Emerging techniques for nanorobotic manipulation during SEM imaging enable the characterization of nanomaterials and nanostructures and the prototyping/assembly of nanodevices. This paper presents a comprehensive survey of recent advances in nanorobotic manipulation, including the development of nanomanipulation platforms, tools, changeable toolboxes, sensing units, control strategies, electron beam-induced deposition approaches, automation techniques, and nanomanipulation-enabled applications and discoveries. The limitations of the existing technologies and prospects for new technologies are also discussed.

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          Invited review article: high-speed flexure-guided nanopositioning: mechanical design and control issues.

          Peter Yong, S Moheimani, B Kenton … (2012)
          Recent interest in high-speed scanning probe microscopy for high-throughput applications including video-rate atomic force microscopy and probe-based nanofabrication has sparked attention on the development of high-bandwidth flexure-guided nanopositioning systems (nanopositioners). Such nanopositioners are designed to move samples with sub-nanometer resolution with positioning bandwidth in the kilohertz range. State-of-the-art designs incorporate uniquely designed flexure mechanisms driven by compact and stiff piezoelectric actuators. This paper surveys key advances in mechanical design and control of dynamic effects and nonlinearities, in the context of high-speed nanopositioning. Future challenges and research topics are also discussed.
          Article 0 comments Cited 66 times – based on 0 reviews     Review now
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            In situ mechanical characterization of the cell nucleus by atomic force microscopy.

            Haijiao Liu, Yong-Jun Wen, Yun Xiao … (2014)
            The study of nuclear mechanical properties can provide insights into nuclear dynamics and its role in cellular mechanotransduction. While several methods have been developed to characterize nuclear mechanical properties, direct intracellular probing of the nucleus in situ is challenging. Here, a modified AFM (atomic force microscopy) needle penetration technique is demonstrated to mechanically characterize cell nuclei in situ. Cytoplasmic and nuclear stiffness were determined based on two different segments on the AFM indentation curves and were correlated with simultaneous confocal Z-stack microscopy reconstructions. On the basis of direct intracellular measurement, we show that the isolated nuclei from fibroblast-like cells exhibited significantly lower Young's moduli than intact nuclei in situ. We also show that there is in situ nucleus softening in the highly metastatic bladder cancer cell line T24 when compared to its less metastatic counterpart RT4. This technique has potential to become a reliable quantitative measurement tool for intracellular mechanics studies.
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              Mechanical properties of vapor-liquid-solid synthesized silicon nanowires.

              Yong Fu Zhu, Feng Xu, Qingquan Qin … (2009)
              The Young's modulus and fracture strength of silicon nanowires with diameters between 15 and 60 nm and lengths between 1.5 and 4.3 mum were measured. The nanowires, grown by the vapor-liquid-solid process, were subjected to tensile tests in situ inside a scanning electron microscope. The Young's modulus decreased while the fracture strength increased up to 12.2 GPa, as the nanowire diameter decreased. The fracture strength also increased with the decrease of the side surface area; the increase rate for the chemically synthesized silicon nanowires was found to be much higher than that for the microfabricated silicon thin films. Repeated loading and unloading during tensile tests demonstrated that the nanowires are linear elastic until fracture without appreciable plasticity.
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                Author and article information

                Journal
                Journal ID (nlm-ta): Microsyst Nanoeng
                Journal ID (iso-abbrev): Microsyst Nanoeng
                Title: Microsystems & Nanoengineering
                Publisher: Nature Publishing Group
                ISSN (Print): 2096-1030
                ISSN (Electronic): 2055-7434
                Publication date (Electronic): 20 June 2016
                Publication date Collection: 2016
                Volume: 2
                Electronic Location Identifier: 16024
                Affiliations
                [1 ]Department of Mechanical and Industrial Engineering, University of Toronto , Toronto, ON, Canada M5S 3G8
                [2 ]Department of Control Science and Engineering, Zhejiang University , Hangzhou 310058, China
                [3 ]Robotics and Microsystems Center, Soochow University , Suzhou 215021, China
                [4 ]School of Mechatronic Engineering and Automation, Shanghai University , Shanghai 200072, China
                Author notes
                Article
                Publisher Item ID: micronano201624
                DOI: 10.1038/micronano.2016.24
                PMC ID: 6444728
                PubMed ID: 31057824
                SO-VID: 15dd7143-7a5d-4cbe-baf5-b1164d6c50d9
                Copyright © Copyright © 2016 © 2016 Institute of Electronics, Chinese Academy of Sciences
                License:

                This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/

                History
                Date received : 23 February 2016
                Date revision received : 02 April 2016
                Date accepted : 05 April 2016
                Categories
                Subject: Review Article

                Keywords: automated nanomanipulation,scanning electron microscope,sem-based nanomanipulation
                Data availability:
                Keywords: automated nanomanipulation, scanning electron microscope, sem-based nanomanipulation

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