Title:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials,
Processing, Measurement, and Phenomena
Abbreviated Title:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials,
Processing, Measurement, and Phenomena
Publisher:
American Vacuum Society
ISSN
(Print):
2166-2746
ISSN
(Electronic):
2166-2754
Publication date Created:
July
2016
Publication date
(Print):
July
2016
Volume: 34
Issue: 4
Page: 040604
Article
DOI: 10.1116/1.4948531
SO-VID: 180cbefd-ef4a-491f-9876-63ea5ec7624f
Copyright © ©
2016