The authors describe a detailed evaluation of the capabilities of imaging and image registration systems available with Varian linear accelerators for image guided radiation therapy (IGRT). Specifically, they present modulation transfer function curves for megavoltage planar, kilovoltage (kV) planar, and cone beam computed tomography imaging systems and compare these with conventional computed tomography. While kV planar imaging displayed the highest spatial resolution, all IGRT imaging techniques were assessed as adequate for their intended purpose. They have also characterized the image registration software available for use in conjunction with these imaging systems through a comprehensive phantom study involving translations in three orthogonal directions. All combinations of imaging systems and image registration software were found to be accurate, although the planar kV imaging system with automatic registration was generally superior, with both accuracy and precision of the order of 1 mm, under the conditions tested. Based on their phantom study, the attainable accuracy for rigid body translations using any of the features available with Varian equipment will more likely be limited by the resolution of the couch readouts than by inherent limitations in the imaging systems and image registration software. Overall, the accuracy and precision of currently available IGRT technology exceed published experience with the accuracy and precision of contouring for planning.