Title:
Semiconductor Science and Technology
Abbreviated Title:
Semicond. Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0268-1242
ISSN
(Electronic):
1361-6641
Publication date Created:
February
01 1998
Publication date
(Print):
February
01 1998
Publication date
(Electronic):
January
01 1999
Volume: 13
Issue: 2
Pages: 174-180
Article
DOI: 10.1088/0268-1242/13/2/003
SO-VID: 19862851-64a2-4043-91ab-e550d2582682
Copyright © ©
1999