On-Wafer Spectrofluorometric Method for Determination of Relative Quantum Yields of Photoacid Generation in Chemically Amplified Resists

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Journal

Title: Analytical Chemistry

Abbreviated Title: Anal. Chem.

Publisher: American Chemical Society (ACS)

ISSN (Print): 0003-2700

ISSN (Electronic): 1520-6882

Publication date Created: July 2001

Publication date (Print): July 2001

Volume: 73

Issue: 14

Pages: 3472-3480

Article

DOI: 10.1021/ac0015319

SO-VID: 1a955b68-c2b2-4a9d-850d-8d1506668e66

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