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Low temperature growth and optical properties of α-Ga2O3 deposited on sapphire by plasma enhanced atomic layer deposition
J.W. Roberts ,
P.R. Chalker ,
B. Ding ,
R.A. Oliver ,
J.T. Gibbon ,
L.A.H. Jones ,
V.R. Dhanak ,
L.J. Phillips ,
J.D. Major ,
F.C.-P. Massabuau
September 2019
September 2019
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