Title:
Journal of Micromechanics and Microengineering
Abbreviated Title:
J. Micromech. Microeng.
Publisher:
IOP Publishing
ISSN
(Print):
0960-1317
ISSN
(Electronic):
1361-6439
Publication date Created:
February
01 2005
Publication date
(Print):
February
01 2005
Volume: 15
Issue: 2
Pages: R1-R16
Article
DOI: 10.1088/0960-1317/15/2/R01
SO-VID: 1e477290-64b2-4125-b49c-36d06827da90
Copyright © ©
2005