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Studies of atomic oxygen in O2+CF4 rf discharges by two‐photon laser‐induced fluorescence and optical emission spectroscopy
March 1986
March 1986
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Most cited references21
- Record: found
- Abstract: not found
- Article: not found
Optical emission spectroscopy of reactive plasmas: A method for correlating emission intensities to reactive particle density
- Record: found
- Abstract: not found
- Article: not found
Electron-impact excitation of electronic states in argon at incident energies between 16 and 100 eV
D. C. Cartwright, A. Chutjian (1981)
- Record: found
- Abstract: not found
- Article: not found
Anisotropic etching of SiO2in low‐frequency CF4/O2and NF3/Ar plasmas
D. L. Flamm, V. Donnelly, W. Dautremont-Smith … (1984)