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      Low temperature atomic layer deposition of highly conformal tin nitride thin films for energy storage devices

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          Journal
          ACS Applied Materials & Interfaces
          ACS Appl. Mater. Interfaces
          American Chemical Society (ACS)
          1944-8244
          1944-8252
          October 21 2019
          October 21 2019
          Article
          10.1021/acsami.9b15790
          © 2019
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