1
views
0
recommends
+1 Recommend
0 collections
    0
    shares
      • Record: found
      • Abstract: found
      • Article: found
      Is Open Access

      Atomic layer deposition of LiF using LiN(SiMe 3) 2 and SF 6 plasma

      Read this article at

      Bookmark
          There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.

          Abstract

          Lithium fluoride films were prepared by atomic layer deposition (ALD) using a new route in which LiN(SiMe 3) 2 is used as a precursor and SF 6 plasma as a coreactant. It was demonstrated that SF 6 plasma is a promising coreactant for ALD of high purity lithium fluoride films.

          Abstract

          Lithium fluoride films were prepared by atomic layer deposition (ALD) using a new route in which LiN(SiMe 3) 2 is used as a precursor and SF 6 plasma as a coreactant. Conformal LiF films were deposited at 150 °C at a growth rate of ∼0.4 Å per cycle. All deposited films were polycrystalline and slightly lithium-rich with a composition of LiF 0.8, independently of the plasma conditions ( e.g. exposure time, pressure and power). The levels of H, C, N, O, Si, and S were all <1 at%. Spectroscopic ellipsometry measurements were carried out over the wavelength range of 140–2480 nm and showed a refractive index of 1.37 at 633 nm for films deposited using 1 s plasma exposure time. We conclude that short plasma exposures are preferred, since a prolonged exposure time leads to an increase in optical absorption and lower growth per cycle values. Furthermore, mass spectrometry measurements revealed the formation of SiMe 3F species during both half-cycles, originating from the reaction between the precursor ligands and fluorine species present either at the surface or in the plasma. Moreover, the SF 6 plasma step led to the formation of fluorocarbon species, suggesting that dissociation and recombination in the plasma takes place. Overall, this work demonstrates that SF 6 plasma offers a promising alternative to other coreactants for ALD of high purity lithium fluoride.

          Related collections

          Most cited references48

          • Record: found
          • Abstract: not found
          • Article: not found

          Atomic layer deposition: an overview.

            Bookmark
            • Record: found
            • Abstract: not found
            • Article: not found

            2.5% efficient organic plastic solar cells

              Bookmark
              • Record: found
              • Abstract: not found
              • Article: not found

              Interface Stability in Solid-State Batteries

                Bookmark

                Author and article information

                Contributors
                Journal
                PPCPFQ
                Physical Chemistry Chemical Physics
                Phys. Chem. Chem. Phys.
                Royal Society of Chemistry (RSC)
                1463-9076
                1463-9084
                April 22 2021
                2021
                : 23
                : 15
                : 9304-9314
                Affiliations
                [1 ]Department of Applied Physics
                [2 ]Eindhoven University of Technology
                [3 ]5600 MB Eindhoven
                [4 ]The Netherlands
                [5 ]J.A. Woollam Co., Inc.
                [6 ]Lincoln
                [7 ]USA
                Article
                10.1039/D0CP05428C
                1fd286e8-241b-4aca-ab72-f52ac9db8b1d
                © 2021

                http://creativecommons.org/licenses/by/3.0/

                History

                Comments

                Comment on this article