Modified Thornton model for magnetron sputtered zinc oxide: film structure and etching behaviour

Kluth, Oliver; Schöpe, Gunnar; Hüpkes, Jürgen; Agashe, Chitra; Müller, Joachim Michael; Rech, Bernd

doi:10.1016/S0040-6090(03)00949-0

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Modified Thornton model for magnetron sputtered zinc oxide: film structure and etching behaviour

Author(s): Oliver Kluth , Gunnar Schöpe , Jürgen Hüpkes , Chitra Agashe , Joachim Müller , Bernd Rech

Publication date Created: October 2003

Publication date (Print): October 2003

Journal: Thin Solid Films

Publisher: Elsevier BV

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Title: Thin Solid Films

Abbreviated Title: Thin Solid Films

Publisher: Elsevier BV

ISSN (Print): 00406090

Publication date Created: October 2003

Publication date (Print): October 2003

Volume: 442

Issue: 1-2

Pages: 80-85

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DOI: 10.1016/S0040-6090(03)00949-0

SO-VID: 20c9b50c-13f6-481b-8035-38fa7b69fb02

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http://www.elsevier.com/tdm/userlicense/1.0/

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Modified Thornton model for magnetron sputtered zinc oxide: film structure and etching behaviour

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Silicon thin film solar cells

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