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Modified Thornton model for magnetron sputtered zinc oxide: film structure and etching behaviour

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      Journal
      Thin Solid Films
      Thin Solid Films
      Elsevier BV
      00406090
      October 2003
      October 2003
      : 442
      : 1-2
      : 80-85
      10.1016/S0040-6090(03)00949-0
      © 2003

      http://www.elsevier.com/tdm/userlicense/1.0/

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