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      Multilayer heterogeneous electrical insulation structure of HfO2/Al2O3 for high-temperature thin-film sensor on superalloy substrate

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          Electronic properties of hafnium oxide: A contribution from defects and traps

          Vladimir A. Gritsenko, Timofey Perevalov, Damir Islamov (2016)
          Article 0 comments Cited 24 times – based on 0 reviews     Review now
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            Nanoindentation Investigation of HfO[sub 2] and Al[sub 2]O[sub 3] Films Grown by Atomic Layer Deposition

            D. Gu, A. Elmustafa, D Stone … (2008)
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              Growth and structure control of HfO2−x films with cubic and tetragonal structures obtained by ion beam assisted deposition

              Giora Kimmel, Rafael Manory, Takanori Mori … (2002)
              Article 0 comments Cited 16 times – based on 0 reviews     Review now
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                Author and article information

                Contributors
                Journal
                Title: Applied Surface Science
                Abbreviated Title: Applied Surface Science
                Publisher: Elsevier BV
                ISSN (Print): 01694332
                Publication date Created: January 2024
                Publication date (Print): January 2024
                Volume: 642
                Page: 158592
                Article
                DOI: 10.1016/j.apsusc.2023.158592
                SO-VID: 215a0d24-26a5-49fa-8092-9cb5c49cc6c4
                Copyright © © 2024
                License:

                https://www.elsevier.com/tdm/userlicense/1.0/

                https://doi.org/10.15223/policy-017

                https://doi.org/10.15223/policy-037

                https://doi.org/10.15223/policy-012

                https://doi.org/10.15223/policy-029

                https://doi.org/10.15223/policy-004

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