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      Nanoelectromechanical systems.

      1
      Science (New York, N.Y.)
      American Association for the Advancement of Science (AAAS)

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          Abstract

          Nanoelectromechanical systems are evolving, with new scientific studies and technical applications emerging. Mechanical devices are shrinking in thickness and width to reduce mass, increase resonant frequency, and lower the force constants of these systems. Advances in the field include improvements in fabrication processes and new methods for actuating and detecting motion at the nanoscale. Lithographic approaches are capable of creating freestanding objects in silicon and other materials, with thickness and lateral dimensions down to about 20 nanometers. Similar processes can make channels or pores of comparable dimensions, approaching the molecular scale. This allows access to a new experimental regime and suggests new applications in sensing and molecular interactions.

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          Author and article information

          Journal
          Science
          Science (New York, N.Y.)
          American Association for the Advancement of Science (AAAS)
          0036-8075
          0036-8075
          Nov 24 2000
          : 290
          : 5496
          Affiliations
          [1 ] School of Applied and Engineering Physics, Cornell University, Ithaca, NY 14853, USA.
          Article
          9004
          10.1126/science.290.5496.1532
          11090343
          22208d4b-96e6-4858-85c4-87bd4bf7ae46
          History

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