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      Design of ion-implanted MOSFET's with very small physical dimensions

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          Journal
          IEEE Journal of Solid-State Circuits
          IEEE J. Solid-State Circuits
          Institute of Electrical and Electronics Engineers (IEEE)
          0018-9200
          October 1974
          October 1974
          : 9
          : 5
          : 256-268
          Article
          10.1109/JSSC.1974.1050511
          © 1974
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