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2,471
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Redistribution and activation of implanted S, Se, Te, Be, Mg, and C in GaN
Author(s):
R. T. WILSON
,
J. Zavada
,
X. CAO
,
R. Singh
,
S. Pearton
,
H. C. Guo
,
S. Pennycook
,
M. FU
,
J. A. Sekhar
,
V. Scarvepalli
,
Michael Shu
,
J HAN
,
P. J. Rieger
,
J. Zolper
,
C. Abernathy
Publication date:
1999
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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DOI::
10.1116/1.581800
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