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Flash Lamp Activation of N- and p-Type Dopants in Strained and Unstrained SOI and HOI
Author(s):
R. Minamisava
,
D Buca
,
W. Heiermann
,
F. Lanzerath
,
S Mantl
,
W Skorupa
,
J-M Hartmann
,
B. Ghyselen
,
N. Kernevez
,
U Breuer
,
Renato Minamisava
,
Dan Buca
,
Wolfgang Heiermann
,
Franz Lanzerath
,
Siegfried Mantl
,
Wolfgang Skorupa
,
Jean-Michel Hartmann
,
Bruno Ghyselen
,
Nelly Kernevez
,
Uwe Breuer
Publication date:
2009
Journal:
ECS Trans.
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DOI::
10.1149/1.3118933
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