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      Low-temperature growth of boron carbide coatings by direct current magnetron sputtering and high-power impulse magnetron sputtering

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          A novel pulsed magnetron sputter technique utilizing very high target power densities

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            Boron carbide—A comprehensive review

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              Intrinsic stress in sputter-deposited thin films

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                Author and article information

                Journal
                Journal of Materials Science
                J Mater Sci
                Springer Nature America, Inc
                0022-2461
                1573-4803
                December 2016
                August 1 2016
                December 2016
                : 51
                : 23
                : 10418-10428
                Article
                10.1007/s10853-016-0262-4
                29b30c1e-06ce-4936-bb51-0ac086a9a64e
                © 2016

                http://creativecommons.org/licenses/by/4.0

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