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      Atomic layer epitaxy deposition processes

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          Journal
          JVTBD9
          Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
          J. Vac. Sci. Technol. B
          American Vacuum Society
          0734211X
          January 1994
          : 12
          : 1
          : 179
          10.1116/1.587179
          © 1994

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