2
views
0
recommends
+1 Recommend
0 collections
    0
    shares
      • Record: found
      • Abstract: not found
      • Conference Proceedings: not found

      <title>Test structures for CMOS-compatible silicon pressure sensor reliability characterization</title>

      proceedings-article
      , , ,   ,
      , , , , ,
      Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS
      Tuesday 9 May 2000

      Read this article at

      ScienceOpenPublisher
      Bookmark
          There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.

          Related collections

          Author and article information

          Conference
          April 10 2000
          : 250-256
          Article
          10.1117/12.382301
          2e430b0b-56a4-4e93-8914-2194a400c652
          © 2000
          Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS
          Paris, France
          Tuesday 9 May 2000
          History

          Comments

          Comment on this article