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<title>Test structures for CMOS-compatible silicon pressure sensor reliability characterization</title>
proceedings-article
Author(s):
Enric Montane
,
Sebastian A. Bota
,
Santiago Marco
,
M. Carmona
,
Josep Samitier
Editor(s):
Bernard Courtois
,
Selden B. Crary
,
Kaigham J. Gabriel
,
Jean Michel Karam
,
Karen W. Markus
,
Andrew A. O. Tay
Publication date
(Print):
April 10 2000
Conference name:
Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS
Conference date:
Tuesday 9 May 2000
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Emerald: Sustainable Structures & Infrastructures
Author and article information
Conference
Publication date (Print):
April 10 2000
Pages
: 250-256
Article
DOI:
10.1117/12.382301
SO-VID:
2e430b0b-56a4-4e93-8914-2194a400c652
Copyright ©
© 2000
Conference name:
Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS
Conference location:
Paris, France
Conference date:
Tuesday 9 May 2000
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