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Processing and characterization of silicon carbon-nitride ceramics: application of electrical properties towards MEMS thermal actuators
January 2003
January 2003
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Fabrication of SiCN MEMS by photopolymerization of pre-ceramic polymer
Li-Anne Liew, Yiping Liu, Ruiling Luo … (2002)
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Fabrication of SiCN ceramic MEMS using injectable polymer-precursor technique
Li-Anne Liew, Wenge Zhang, Victor M. Bright … (2001)
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Applications for surface-micromachined polysilicon thermal actuators and arrays
John H Comtois, Victor M. Bright (1997)