Performance analysis of multi-process semiconductor manufacturing equipment

Atherton, R.W.; Turner, F.T.; Atherton, L.F.; Pool, M.A.

doi:10.1109/ASMC.1990.111237

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Performance analysis of multi-process semiconductor manufacturing equipment

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Author(s): R.W. Atherton , F.T. Turner , L.F. Atherton , M.A. Pool

Publication date: 1990

Publisher: IEEE

Conference name: IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop

Conference date: 11-12 Sept. 1990

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Publisher: IEEE

Publication date: 1990

Pages: 131-136

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DOI: 10.1109/ASMC.1990.111237

SO-VID: 2f7893a3-2b80-446b-961e-08a7b3fe228b

Conference name: IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop

Conference location: Danvers, MA, USA

Conference date: 11-12 Sept. 1990

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