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      High Quality 3D Photonics using Nano Imprint Lithography of Fast Sol-gel Materials

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          Abstract

          A method for the realization of low-loss integrated optical components is proposed and demonstrated. This approach is simple, fast, inexpensive, scalable for mass production, and compatible with both 2D and 3D geometries. The process is based on a novel dual-step soft nano imprint lithography process for producing devices with smooth surfaces, combined with fast sol-gel technology providing highly transparent materials. As a concrete example, this approach is demonstrated on a micro ring resonator made by direct laser writing (DLW) to achieve a quality factor improvement from one hundred thousand to more than 3 million. To the best of our knowledge this also sets a Q-factor record for UV-curable integrated micro-ring resonators. The process supports the integration of many types of materials such as light-emitting, electro-optic, piezo-electric, and can be readily applied to a wide variety of devices such as waveguides, lenses, diffractive elements and more.

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          Most cited references24

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          Finer features for functional microdevices.

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            Direct laser writing of three-dimensional photonic-crystal templates for telecommunications.

            The past decade has witnessed intensive research efforts related to the design and fabrication of photonic crystals. These periodically structured dielectric materials can represent the optical analogue of semiconductor crystals, and provide a novel platform for the realization of integrated photonics. Despite intensive efforts, inexpensive fabrication techniques for large-scale three-dimensional photonic crystals of high enough quality, with photonic bandgaps at near-infrared frequencies, and built-in functional elements for telecommunication applications, have been elusive. Direct laser writing by multiphoton polymerization of a photoresist has emerged as a technique for the rapid, cheap and flexible fabrication of nanostructures for photonics. In 1999, so-called layer-by-layer or woodpile photonic crystals were fabricated with a fundamental stop band at 3.9 microm wavelength. In 2002, a corresponding 1.9 microm was achieved, but the important face-centred-cubic (f.c.c.) symmetry was abandoned. Importantly, fundamental stop bands or photonic bandgaps at telecommunication wavelengths have not been demonstrated. In this letter, we report the fabrication--through direct laser writing--and detailed characterization of high-quality large-scale f.c.c. layer-by-layer structures, with fundamental stop bands ranging from 1.3 to 1.7 microm.
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              A photon turnstile dynamically regulated by one atom.

              Beyond traditional nonlinear optics with large numbers of atoms and photons, qualitatively new phenomena arise in a quantum regime of strong interactions between single atoms and photons. By using a microscopic optical resonator, we achieved such interactions and demonstrated a robust, efficient mechanism for the regulated transport of photons one by one. With critical coupling of the input light, a single atom within the resonator dynamically controls the cavity output conditioned on the photon number at the input, thereby functioning as a photon turnstile. We verified the transformation from a Poissonian to a sub-Poissonian photon stream by photon counting measurements of the input and output fields. The results have applications in quantum information science, including for controlled interactions of single light quanta and for scalable quantum processing on atom chips.
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                Author and article information

                Contributors
                kobys@eng.tau.ac.il
                Journal
                Sci Rep
                Sci Rep
                Scientific Reports
                Nature Publishing Group UK (London )
                2045-2322
                18 May 2018
                18 May 2018
                2018
                : 8
                : 7833
                Affiliations
                [1 ]ISNI 0000 0004 1937 0546, GRID grid.12136.37, Department of Physical Electronics, , Tel-Aviv University, Ramat-Aviv, ; 6997 Tel-Aviv, Israel
                [2 ]ISNI 0000 0001 0075 5874, GRID grid.7892.4, Light Technology Institute, , Karlsruhe Institute of Technology (KIT), ; 76131 Karlsruhe, Germany
                [3 ]ISNI 0000 0001 0075 5874, GRID grid.7892.4, Institute of Microstructure Technology, , Karlsruhe Institute of Technology (KIT), ; 76344 Karlsruhe, Germany
                [4 ]ISNI 0000 0001 0075 5874, GRID grid.7892.4, Institute of Applied Physics, , Karlsruhe Institute of Technology (KIT), ; 76131 Karlsruhe, Germany
                [5 ]ISNI 0000 0001 2230 3545, GRID grid.419373.b, Photonic Materials Group, , Applied Physics Division, Soreq NRC, ; 81800 Yavne, Israel
                Author information
                http://orcid.org/0000-0002-3698-1512
                Article
                26261
                10.1038/s41598-018-26261-3
                5959872
                29777156
                2f8ec676-b5ed-42c4-908c-354ed602e6d0
                © The Author(s) 2018

                Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

                History
                : 8 January 2018
                : 9 May 2018
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