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741
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Nitrogen and oxygen transport and reactions during plasma nitridation of zirconium thin films
Author(s):
L Pichon
,
A. Straboni
,
T. Girardeau
,
M. Drouet
,
P Widmayer
,
M. DROUET
Publication date:
2000
Journal:
J. Appl. Phys.
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DOI::
10.1063/1.371961
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