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      Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR)

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          There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.

          Abstract

          The mass sensitivity of thin aluminum nitride (AlN) film S0 Lamb wave resonators is theoretically and experimentally studied. Theoretical predictions based on modal and finite elements method analysis are experimentally verified. Here, two-port 888 MHz synchronous FPARs are micromachined and subsequently coated with hexamethyl-disiloxane(HMDSO)-plasma-polymerized thin films of various thicknesses. Systematic data on frequency shift and insertion loss versus film thickness are presented. FPARs demonstrate high mass-loading sensitivity as well as good tolerance towards the HMDSO viscous losses. Initial measurements in gas phase environment are further presented.

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          Matrix methods applied to acoustic waves in multilayers.

          E.L. Adler (1990)
          Matrix methods for analyzing the electroacoustic characteristics of anisotropic piezoelectric multilayers are described. The conceptual usefulness of the methods is demonstrated in a tutorial fashion by examples showing how formal statements of propagation, transduction, and boundary-value problems in complicated acoustic layered geometries such as those which occur in surface acoustic wave (SAW) devices, in multicomponent laminates, and in bulk-wave composite transducers are simplified. The formulation given reduces the electroacoustic equations to a set of first-order matrix differential equations, one for each layer, in the variables that must be continuous across interfaces. The solution to these equations is a transfer matrix that maps the variables from one layer face to the other. Interface boundary conditions for a planar multilayer are automatically satisfied by multiplying the individual transfer matrices in the appropriate order, thus reducing the problem to just having to impose boundary conditions appropriate to the remaining two surfaces. The computational advantages of the matrix method result from the fact that the problem rank is independent of the number of layers, and from the availability of personal computer software that makes interactive numerical experimentation with complex layered structures practical.
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            Guided shear horizontal surface acoustic wave sensors for chemical and biochemical detection in liquids.

            F Josse, R W Cernose, F Bender (2001)
            The design and performance of guided shear horizontal surface acoustic wave (guided SH-SAW) devices on LiTaO3 substrates are investigated for high-sensitivity chemical and biochemical sensors in liquids. Despite their structural similarity to Rayleigh SAW, SH-SAWs often propagate slightly deeper within the substrate, hence preventing the implementation of high-sensitivity detectors. The device sensitivity to mass and viscoelastic loading is increased using a thin guiding layer on the device surface. Because of their relatively low shear wave velocity, various polymers including poly(methyl methacrylate) (PMMA) and cyanoethyl cellulose (cured or cross-linked) are investigated as the guiding layers to trap the acoustic energy near the sensing surface. The devices have been tested in biosensing and chemical sensing experiments. Suitable design principles for these applications are discussed with regard to wave guidance, electrical passivation of the interdigital transducers from the liquid environments, acoustic loss, and sensor signal distortion. In biosensing experiments, using near-optimal PMMA thickness of approximately 2 microm, mass sensitivity greater than 1500 Hz/(ng/mm2) is demonstrated, resulting in a minimum detection limit less than 20 pg/mm2. For chemical sensor experiments, it is found that optimal waveguide thickness must be modified to account for the chemically sensitive layer which also acts to guide the SH-SAW. A detection limit of 780 (3 x peak-to-peak noise) or 180 ppb (3 x rms noise) is estimated from the present measurements for some organic compounds in water.
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              Plate-Mode Ultrasonic Oscillator Sensors

              E.T. Zellers, P.J. Wicher, R.M. White … (1987)
              Article 0 comments Cited 22 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Journal ID (nlm-ta): Sensors (Basel)
                Title: Sensors (Basel, Switzerland)
                Publisher: Molecular Diversity Preservation International (MDPI)
                ISSN (Electronic): 1424-8220
                Publication date Collection: 2011
                Publication date (Electronic): 4 July 2011
                Volume: 11
                Issue: 7
                Pages: 6942-6953
                Affiliations
                [1 ] Department of Solid State Electronics, Uppsala University, 751 21 Uppsala, Sweden; E-Mails: liar@ 123456angstrom.uu.se (L.A.); ilia@ 123456angstrom.uu.se (I.K.)
                [2 ] Department of Solid State Physics and Microelectronics, University of Sofia, 1164 Sofia, Bulgaria; E-Mails: gerry@ 123456phys.uni-sofia.bg (G.A.); ves@ 123456phys.uni-sofia.bg (V.S.)
                [3 ] Georgy Nadjakov Institute of Solid State Physics, 1784 Sofia, Bulgaria; E-Mail: eradeva@ 123456issp.bas.bg (E.R.)
                Author notes
                [* ]Author to whom correspondence should be addressed; E-Mail: veya@ 123456angstrom.uu.se .
                Article
                Publisher ID: sensors-11-06942
                DOI: 10.3390/s110706942
                PMC ID: 3231650
                PubMed ID: 22163994
                SO-VID: 33069c93-94e1-44e6-95ab-7eb08bfbc3e3
                Copyright © © 2011 by the authors; licensee MDPI, Basel, Switzerland.
                License:

                This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license ( http://creativecommons.org/licenses/by/3.0/).

                History
                Date received : 8 May 2011
                Date revision received : 8 June 2011
                Date accepted : 28 June 2011
                Categories
                Subject: Article

                ScienceOpen disciplines: Biomedical engineering
                Keywords: resonator,gravimetric,hmdso,membrane,aluminum nitride,sensitivity
                Data availability:
                ScienceOpen disciplines: Biomedical engineering
                Keywords: resonator, gravimetric, hmdso, membrane, aluminum nitride, sensitivity

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