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Thickness uniformity of gas-phase coatings in narrow channels II One-side confined channels
Author(s):
E M Tolstopyatov
,
S. Yang
,
M. KIM
Publication date:
2002
Journal:
J. Phys. D: Appl. Phys.
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Science for Clean Energy Horizon 2020
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DOI::
10.1088/0022-3727/35/21/306
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