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High speed control of electro-mechanical transduction Advanced Drive Techniques for Optimized Step-and-Settle Response of MEMS Micromirrors

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      Abstract

      Micro/Nano Electro Mechanical Systems (MEMS/NEMS) provide the engineer with a powerful set of solutions to a wide variety of technical challenges. However, because they are mechanical systems, response times can be a limitation. In some situations, advanced engineered drive techniques can improve response times by as much as a thousand, significantly opening up the application space for MEMS/NEMS solutions.

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      Preshaping Command Inputs to Reduce System Vibration

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        Feedback for physicists: A tutorial essay on control

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          Electrostatic pull-in instability in MEMS/NEMS: A review

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            Author and article information

            Journal
            2015-12-15
            2016-02-11
            1512.05297

            http://arxiv.org/licenses/nonexclusive-distrib/1.0/

            Custom metadata
            37 pages, 20 figures
            physics.ins-det physics.optics

            Technical & Applied physics, Optical materials & Optics

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