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      High speed control of electro-mechanical transduction Advanced Drive Techniques for Optimized Step-and-Settle Response of MEMS Micromirrors

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          Abstract

          Micro/Nano Electro Mechanical Systems (MEMS/NEMS) provide the engineer with a powerful set of solutions to a wide variety of technical challenges. However, because they are mechanical systems, response times can be a limitation. In some situations, advanced engineered drive techniques can improve response times by as much as a thousand, significantly opening up the application space for MEMS/NEMS solutions.

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          Most cited references 62

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          Preshaping Command Inputs to Reduce System Vibration

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            Silicon carbide MEMS for harsh environments

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              Electrostatic pull-in instability in MEMS/NEMS: A review

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                Author and article information

                Journal
                2015-12-15
                2016-02-11
                10.1109/MCS.2016.2584338
                1512.05297

                http://arxiv.org/licenses/nonexclusive-distrib/1.0/

                Custom metadata
                37 pages, 20 figures
                physics.ins-det physics.optics

                Technical & Applied physics, Optical materials & Optics

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