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      Projection micro-stereolithography using digital micro-mirror dynamic mask

      , , ,
      Sensors and Actuators A: Physical
      Elsevier BV

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          Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

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            Micro-stereolithography of polymeric and ceramic microstructures

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              Study of the spatial resolution of a new 3D microfabrication process: the microstereophotolithography using a dynamic mask-generator technique

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                Author and article information

                Journal
                Sensors and Actuators A: Physical
                Sensors and Actuators A: Physical
                Elsevier BV
                09244247
                May 2005
                May 2005
                : 121
                : 1
                : 113-120
                Article
                10.1016/j.sna.2004.12.011
                3c3e119e-0555-4a58-ad40-d2105cd27020
                © 2005

                http://www.elsevier.com/tdm/userlicense/1.0/

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