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Projection micro-stereolithography using digital micro-mirror dynamic mask
Author(s):
C. Sun
,
N. Fang
,
D.M. Wu
,
X. Zhang
Publication date
Created:
May 2005
Publication date
(Print):
May 2005
Journal:
Sensors and Actuators A: Physical
Publisher:
Elsevier BV
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The Dynamic Brain
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6
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Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)
E.W. Becker
,
D. Münchmeyer
,
W Ehrfeld
…
(1986)
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Micro-stereolithography of polymeric and ceramic microstructures
X. Zhang
,
X.N Jiang
,
C. Sun
(1999)
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Study of the spatial resolution of a new 3D microfabrication process: the microstereophotolithography using a dynamic mask-generator technique
A Bertsch
,
J.Y. Jézéquel
,
J.C. André
(1997)
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Author and article information
Journal
Title:
Sensors and Actuators A: Physical
Abbreviated Title:
Sensors and Actuators A: Physical
Publisher:
Elsevier BV
ISSN (Print):
09244247
Publication date Created:
May 2005
Publication date (Print):
May 2005
Volume
: 121
Issue
: 1
Pages
: 113-120
Article
DOI:
10.1016/j.sna.2004.12.011
SO-VID:
3c3e119e-0555-4a58-ad40-d2105cd27020
Copyright ©
© 2005
License:
http://www.elsevier.com/tdm/userlicense/1.0/
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