Title:
Plasma Sources Science and Technology
Abbreviated Title:
Plasma Sources Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0963-0252
ISSN
(Electronic):
1361-6595
Publication date Created:
August
01 1992
Publication date
(Print):
August
01 1992
Volume: 1
Issue: 3
Pages: 207-220
Article
DOI: 10.1088/0963-0252/1/3/011
SO-VID: 3dc59566-41b5-4fce-913a-60535d782a9a
Copyright © ©
1992